In today's rapidly developing technology, our lives are filled with various smart devices, from smartphones to smartwatches, from automotive electronic systems to smart home devices. The reason why these devices can achieve such rich functions is inseparable from a magical technology - MEMS (Micro Electro Mechanical System). MEMS devices, with their unique advantages, are quietly changing our lives.

What are MEMS devices?

MEMS devices, in simple terms, are micro devices or systems that integrate mechanical components, sensors, actuators, and electronic components onto the same chip. Its size is usually a few millimeters or even smaller, and its internal structure is generally on the micrometer or even nanometer scale. You can imagine it as a super mini robot, despite its small size, possessing powerful functions.

MEMS devices involve multiple disciplines and technologies such as electronics, mechanics, materials, physics, chemistry, biology, medicine, etc., and are the crystallization of interdisciplinary technology. It is developed based on microelectronics technology, using microfabrication technology to manufacture various micro mechanical structures such as micro beams, micro gears, micro films, etc. on substrate materials such as silicon wafers, and then combined with sensors, actuators, and electronic circuits to form a complete intelligent system.

Application advantages of MEMS devices

Miniature, powerful yet compact in size

One of the biggest characteristics of MEMS devices is miniaturization. It has a small volume and light weight, and the size of a single MEMS sensor is usually measured in millimeters or even micrometers. For example, common MEMS products typically have dimensions of 3mm x 3mm x 1.5mm, or even smaller. This miniaturization feature enables MEMS devices to be easily integrated into various miniaturized devices, such as smartphones, wearable devices, etc.

In smartphones, MEMS accelerometers and gyroscopes can achieve functions such as screen rotation and gesture control; In wearable medical devices, MEMS sensors can achieve various functions such as heart rate monitoring, blood pressure monitoring, sleep monitoring, etc. The implementation of these functions is due to the miniaturization of MEMS devices, which allows devices to maintain their small and portable size while possessing more intelligent functions.

Low power consumption, extending device battery life

In today's era of emphasizing energy conservation and environmental protection, low power consumption has become one of the important indicators of electronic devices. MEMS devices happen to have this advantage, as they have low energy consumption and can extend the battery life of devices, making them suitable for devices that work for long periods of time.

Taking IoT devices as an example, these devices typically require long periods of outdoor work and have extremely high power consumption requirements. MEMS sensors can achieve low-power environmental monitoring and data acquisition, allowing devices to operate for long periods of time while reducing energy consumption. For example, smart watches, due to the low-power characteristics of MEMS devices, can continuously monitor users' health data without frequent charging, providing users with more convenient services.

Low cost, significant advantages in large-scale production

MEMS devices can be mass-produced using mature semiconductor manufacturing processes, greatly reducing unit costs. In semiconductor manufacturing, approximately 1000 MEMS chips can be simultaneously cut from an 8-inch silicon wafer, which greatly reduces the cost of MEMS devices through mass production.

In the automotive industry, the cost advantage of MEMS sensors makes their applications more widespread in safety airbags, tire pressure monitoring systems, and other areas. In the past, car airbag systems used mechanical sensors, which were bulky, high in power consumption, and slow in response; Modern car airbag systems use MEMS accelerometers, which are not only small in size, low in power consumption, and fast in response, but also have lower costs. They can more accurately detect collisions and trigger airbags in a timely manner, greatly improving driving safety.

High integration, creating a multifunctional intelligent system

Another significant advantage of MEMS devices is their high level of integration. Generally speaking, a single MEMS often integrates ASIC chips, controls MEMS chips, and converts analog signals to digital outputs while packaging mechanical sensors. At the same time, different packaging processes can integrate multiple sensors or actuators with different functions, sensitive directions, or actuation directions into one, or form microsensor arrays, microactuator arrays, and even integrate multiple functional devices together to form complex microsystems.

For example, in the inertial measurement unit (IMU), from the earliest discrete inertial sensors, it has developed into a 10 degree of freedom high-precision MEMS inertial measurement unit that integrates three-axis gyroscopes, accelerometers, magnetometers, a pressure sensor, and a processor in a single package. This highly integrated design not only reduces the size of the equipment, but also improves the reliability and stability of the system.

High precision and reliability to meet demanding application requirements

MEMS devices have the characteristics of high precision, high sensitivity, and high reliability, which can achieve high-performance data acquisition and processing. In the aerospace field, MEMS sensors can be used for high-precision attitude measurement and navigation systems, providing precise data support for flight control of aircraft. In medical devices, MEMS sensors can be integrated with signal processing circuits to achieve miniaturization and portability of medical monitoring devices. For example, implantable pressure sensors can monitor pressure changes in the body, such as intracranial pressure, intraocular pressure, etc., providing important basis for doctors' diagnosis and treatment.

Strong adaptability and wide application fields

The application fields of MEMS devices are extremely wide, covering almost all industries. In the field of consumer electronics, it makes devices such as smartphones and tablets more intelligent and convenient; In the field of automotive electronics, it enhances the safety and comfort of cars; In the field of industrial control, it has achieved high-precision environmental monitoring and data acquisition, improving production efficiency and safety; In the field of healthcare, it provides new means for the diagnosis and treatment of diseases; In the aerospace field, it provides reliable support for the flight control of aircraft; In the field of smart homes, it makes home devices more intelligent and improves people's quality of life.

 Source: Sensor Expert Network