Zhengzhou University: Research and development of high temperature extreme environmental strain-temperature integrated sensor
Facing the key needs of national key areas, the in-situ real-time measurement of temperature, strain and other information in some extreme environments is an important monitoring means to achieve the safe operation of high-end weapons and equipment and high-performance engines in extreme environments, and is of great significance to improve China's national defense strength and national core competitiveness.In practical applications, several important parameters need to be emphasized, such as sensitivity, response rate, stability, range, miniaturization and multi-functionalization. Among the high temperature strain sensors that have been successfully commercialized, the metal strain gauge can not meet the demand for its life and stability due to its poor corrosion and oxidation resistance.The fiber Bragg grating strain sensor has the disadvantages of small range and complex signal decoupling. SiC capacitive strain gauges can work well in corrosive environments, but their maximum operating temperature and strain range are limited, and these deficiencies limit their further application in extreme environments.Therefore, the study of miniaturized sensors capable of simultaneously measuring temperature and strain in high-temperature extreme environments is full of challenges.
Polymer precursor ceramics (PDCs) have been widely used in micro-electro-mechanical systems (MEMS), microsensors, coatings and other fields due to their excellent high temperature semiconductor properties, piezoresistive effect, oxidation resistance and corrosion resistance.At the same time, PDCs with complex structures can be prepared simply and economically based on liquid polymer precursors. Therefore, PDCs may be a strong candidate for manufacturing high temperature extreme environmental strain sensors with excellent performance.In this paper, a multi-functional, miniaturized and wide-range integrated temperature and strain sensor was prepared by using polymer precursor SiCN ceramic. The special structural design successfully solved the temperature drift effect and realized the accurate measurement of temperature and strain at the same time under high temperature extreme environment.
Source: Sensor Expert Network